2" dia. InGaAs EPI Film on InP (SI) (100) Depositied by MOCVD ( InP:Fe) 2" dia x0.35mm,2sp,Film:750 nm Tube Furnaces Impurity: MgO < 0

Impurity:       MgO < 0

Click the picture below to see how to

P: pressure (Mpa) applied to your working piece

please click the pictures left to order

It can be removed the NiO by annealing in the hydrogen furnace

2" dia. InGaAs EPI Film on InP (SI) (100) Depositied by MOCVD ( InP:Fe) 2" dia x0.35mm,2sp,Film:750 nm Tube Furnaces Impurity: MgO < 02" dia. wafer InGaAs EPI on InP (Semi insulating)(100) by MOCVD deposition Substrate: InP Orientation: (100) Doped with Fe, Semi Insulating Wafer size: 2" diameter x 0. 35 mm Both sides polished EPI Film : Lattice matched In Ga alloy layer of N type InGaAs(undoped) Film Thickness : 0. 75 um (+ 20%) Roughness of epi layer is close to 1 mono layer (ML) One the back side we can expect some deposits and we can't guarantee the same quality (roughness) as