E00100 - SEMI E1 - Specification for Open Plastic and Metal Wafer Carriers Revision:SEMI E1-1110 (Reapproved 0816) - Inactive SI units are the reference

SI units are the reference units for this Guide

This Standard establishes a Specific Equipment Model (SEM) for Metrology equipment (MSEM)

Format: Online data access compatible with IOS

SEMI E88-0301 (technical revision)

• Carrier scheduling

E00100 - SEMI E1 - Specification for Open Plastic and Metal Wafer Carriers Revision:SEMI E1-1110 (Reapproved 0816) - Inactive SI units are the referenceNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification provides the dimensional requirements for plastic and metal wafer carriers used for the processing and handling of 3 in., 100 mm, 125 mm, and 150 mm diameter wafers. It also includes some related