E02000 - SEMI E20 - Cluster Tool Module Interface: Electrical Power and Emergency Off Standard Revision:SEMI E20-0697 (Reapproved 1102) - Superseded 2 This Specification and Guide

2  This Specification and Guide also provides assay and impurity limits for higher purity Tiers of sulfuric acid for which a need has been identified

This Test Method describes standard procedures for metal oxide semiconductor (MOS) capacitor fabrication

orgで入手可能となる。初版は2011年6月発行，前版は2012年9月発行。

术语涵盖了以下几个方面。

SEMI E47-0301 (Reapproved 0512)

E02000 - SEMI E20 - Cluster Tool Module Interface: Electrical Power and Emergency Off Standard Revision:SEMI E20-0697 (Reapproved 1102) - Superseded 2 This Specification and GuideThis standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Initially available at www. semi. org in October 2010. Originally published in 1991; previously published November 2002. NOTICE: This document was balloted and approved for withdrawal in 2010. The purpose of the standard is to specify the Emergency Off