M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0312 - Superseded 1 This Specification defines the

1  This Specification defines the data items that are required to report

The minimum test described in this Standard is to test one MFC in five common mounting positions using Nitrogen gas at 135

Viewing distance ranges from 0

SEMI E140 — Guide to Calculate Cost of Ownership Metrics for Gas Delivery Systems

and two classes of larger diameter test wafers (from 150 mm)

M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0312 - Superseded 1 This Specification defines theThis Specification divides reclaimed wafers into four application categories: Mechanical, Furnace, Particle, and Lithography and provides tables of the specification requirements for each category. Thus, a prospective purchaser of reclaimed silicon wafers needs to know which application matches his or her requirements. Only requirements for some attributes are specified in Tables 1 and 2. Other requirements are indicated to be customer specified which