C04100 - SEMI C41 - 2-プロパノールの仕様とガイドライン Revision:SEMI C41-0705 - Superseded SEMI G52-1120 (technical revision)

SEMI G52-1120 (technical revision)

Conformance to ‘may’

Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (refer to SEMI P1)

This Guide references SEMI E78

SEMI MF154-1105 (Reapproved 0316)

C04100 - SEMI C41 - 2-プロパノールの仕様とガイドライン Revision:SEMI C41-0705 - Superseded SEMI G52-1120 (technical revision)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Liquid Chemicals Global Technical Committeeglobal Audits and Reviews Subcommittee20054720056www. semi. org19782003 2005 2 2 0. 81. 2 m Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemicals