E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) StdPbc-0324 It includes a specific processing

It includes a specific processing state model as the basis for all equipment behavior of this class

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but application to other wafer size equipment or non-wafer equipment may be appropriate and should be discussed by supplier and end-user

SEMI E30-1103E (editorial revision)

注意: 本文書は，編集上の修正を伴い，再承認された。

E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) StdPbc-0324 It includes a specific processingThis Standard establishes a Specific Equipment Model (SEM) for Metrology equipment (MSEM). The MSEM consists of equipment characteristics and behaviors that are applicable to this class of equipment and are required to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities. The scope of this Standard is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications