E07800 - SEMI E78 - 装置のための静電気放電（ESD）と静電気吸着（ESA）の評価と管理へのガイド StdTpc-Lead Finishes a generic middle-end process flow

a generic middle-end process flow is needed to communicate the frontend and backend processes

orgで入手可能となった。初版は，2013年5月発行。

This Standard applies to any company that must develop equipment training

SEMI M54-0924 (technical revision)

SEMI D39-0704 (first published)

E07800 - SEMI E78 - 装置のための静電気放電（ESD）と静電気吸着（ESA）の評価と管理へのガイド StdTpc-Lead Finishes a generic middle-end process flowglobal Metrics Technical Committee2012830global Audits and Reviews Subcommittee20129www. semiviews. org www. semi. org1998920093 SEMI E129 ESD electrostatic dischargeESDEMI electromagnetic interference ESA electrostatic attraction COO cost of ownershipSEMI E35 International Technology Roadmap for Semiconductors (ITRS) ESD ESD SEMI E43 1 12. 71SEMI E78SEMI E129 EMI, ESD, ESD ESA 67 SEMI E129 Referenced SEMI Standards SEMI E33 Specification for