E11600 - SEMI E116 - 装置性能トラッキング（EPT）のための仕様 Revision:SEMI E116-0707E - Superseded 8 — Guide for High

8 — Guide for High Purity and Ultrahigh Purity Gas Distribution Systems in Semiconductor Manufacturing Equipment

SEMI E6-82 (first published)

Organics deposited on wafers can cause degradation haze

and limits of variation

1が新たに作成されたことを反映して，0307の出版サイクルで更新された。

E11600 - SEMI E116 - 装置性能トラッキング（EPT）のための仕様 Revision:SEMI E116-0707E - Superseded 8 — Guide for HighNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI E 20079R1 13 300 mmEPT EPTEPTEPTEPTMES: Manufacturing Execution SystemSEMI E10SEMI E79EPT (EPT: Equipment Performance Tracking) EPT SEMI E10SEMI E58 SEMI E58SEMI E58SEMI E10 SEMI E10SEMI E79SEMI E10SEMI E79EPTSEMI E10SEMI E79EPTSEMI