E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) Revision:SEMI E54.24-1116 - Superseded SEMI G90 — Specification for

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SEMI C28-0301 (technical revision)

SEMI E116-1017 (technical revision)

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E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) Revision:SEMI E54.24-1116 - Superseded SEMI G90 — Specification forThis Standard describes a specific device structure and behavior of a generic equipment networked sensor. This could include a sensor added onto the equipment that communicates over a sensor actuator communication network. It could also include a sensor that is part of the default configuration of the equipment, communicating over a sensor actuator communication network. This Standard is applicable to sensors which are regarded as data producers only.