M04500 - SEMI M45 - Specification for 300 mm Wafer Shipping System Revision:SEMI M45-1110 - Superseded SEMI E129 — Guide to

SEMI E129 — Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility

The Standard is structured so that new FGs can be added to the Standard through future balloting

in the matrices of interest

· Simultaneous transfer of Material and its Material Data between adjacent equipment

and gain a consistent understanding within

M04500 - SEMI M45 - Specification for 300 mm Wafer Shipping System Revision:SEMI M45-1110 - Superseded SEMI E129 — Guide toThis Standard was technically approved by the Silicon Wafer Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in August 2017; originally published March 2001; previously published November 2010. This Standard stipulates transport related materials and systems to minimize the total cost relating to transport of 300 mm