E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded The purpose of this Document

The purpose of this Document is to provide specifications for silane (SiH4) that is used in the semiconductor industry

a basic set of common services (operations) between the FMCS and the FPUs are specified to exchange FPU status information and data

It covers both conventional metal face sealing and surface mount gas delivery systems

The scope of this Standard is to define WJOBJ which represents WJ

本スタンダードは，global Gases Committeeで技術的に承認されている。現版は2010年4月30日，global Audits and Reviews Subcommitteeにて発行が承認された。2010年6月にwww

E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded The purpose of this DocumentThe purpose of this Guide is to establish a uniform, worldwide means for describing and measuring leak rates of mass flow controllers (MFCs). The leak integrity of a gas delivery system is important to maintaining product quality and performance. This Guide is intended to prevent confusion and misunderstanding between manufacturers and users. In particular, it distinguishes between mechanical and diffusion leak rates. This Guide contains definitions