E02400 - SEMI E24 - クラスタツール・モジュール・インタフェース： 隔離バルブインタロックのスタンダード Revision:SEMI E24-92 (Withdrawn 0710) - Withdrawn The purpose of this Specification

The purpose of this Specification is to enhance the capabilities of the parallel I/O interface defined in SEMI E23 in order to support improvements in the reliability and efficiency of carrier transfer

lubricants

This Document applies only to the following gases:

both at the equipment level and at the module level (e

SEMI MF1388 — Test Method for Generation Lifetime and Generation Velocity of Silicon Material by Capacitance-Time Measurements of Metal-Oxide-Silicon (MOS) Capacitors

E02400 - SEMI E24 - クラスタツール・モジュール・インタフェース： 隔離バルブインタロックのスタンダード Revision:SEMI E24-92 (Withdrawn 0710) - Withdrawn The purpose of this SpecificationGlobal Physical Interfaces & Carriers Committee2010430Global Audits and Reviews Subcommittee20106www. semi. org199220047 2010 Referenced SEMI Standards SEMI E21 Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard