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C00339 - SEMI C3.39 - 三フッ化窒素（NF3）99.98%品質の仕様 Revision:SEMI C3.39-1011 - Superseded This Test Method covers the
C00339 - SEMI C3.39 - 三フッ化窒素（NF3）99.98%品質の仕様 Revision:SEMI C3.39-1011 - Superseded This Test Method covers the
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Description
This Test Method covers the determination of α
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This Test Method refers to the analysis of the bulk of the materials
ISO 11462] in order to obtain reliable
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C00339 - SEMI C3.39 - 三フッ化窒素（NF3）99.98%品質の仕様 Revision:SEMI C3.39-1011 - Superseded This Test Method covers theglobal Gases Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org198920043 (NF3) Referenced SEMI Standards None.
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