D08400 - SEMI D84 - Terminology for FPD Phase Shift Mask and Mask Blanks StdPbc-1217 SEMI C41 — Specifications and

SEMI C41 — Specifications and Guidelines for 2-Propanol

The purpose of this Safety Guideline is to provide information and methods related to flow limiting devices (FLDs) that limit the rate of release of hazardous gases during transportation

This Practice may also be applied to detection of defects in epitaxial layers

This Specification provides information for developing specifications for silicon annealed wafers used to fabricate semiconductor devices and integrated circuits

Flat Panel Display – Factory Automation Global Technical Committeeで技術的に承認されている。現版は2009年5月13日，global Audits and Reviews Subcommitteeにて発行が承認された。2009年7月にwww

D08400 - SEMI D84 - Terminology for FPD Phase Shift Mask and Mask Blanks StdPbc-1217 SEMI C41 — Specifications andThis Standard defines the terminology for FPD phase shift masks and mask blanks. This Standard applies to phase shift masks and mask blanks that are principally used in fabricating flat panel displays. Referenced SEMI Standards (purchase separately) None. Revision History SEMI D84 0823 (first published)