P04800 - SEMI P48 - Specification of Fiducial Marks for EUV Mask Blank StdTpc-Stainless Steel Components The purpose of the Guide

The purpose of the Guide is to avoid prolonged rinse-up of the new HPIX when it is loaded into ion exchange (polish) tanks

This Standard specifies the concepts

SEMI MF84 — Test Method for Measuring Resistivity of Silicon Slices with an In-Line Four-Point Probe

This Specification focuses on polymer material and component performance and validation

which control flow of ≤50 slm nitrogen equivalent at 308 kPa (44

P04800 - SEMI P48 - Specification of Fiducial Marks for EUV Mask Blank StdTpc-Stainless Steel Components The purpose of the GuideThis Standard specifies key requirements of fiducial marks that can be used as a coordinate system for referencing defect locations on extreme ultraviolet (EUV) blanks. This Standard is intended to set an appropriate level of technical specifications of mask fiducial marks, such as their locations, shapes, sizes, line dimensions, and limits of variation. The marks must be readable by mask metrology and pattern write tools. This Standard is not