P02800 - SEMI P28 - Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture StdTpc-Cluster Tools This Standard does not recommend

This Standard does not recommend stopping reporting density parameters using industry traditional metrology based on determining the weight and geometry of the pads (‘geometric parameters’)

All parts of the tube fittings tested by this method in contact with the internal fluid are made of fluorocarbon materials

The calibration method is defined in SEMI M53

The limit of detection is determined by either the BLANK value or by count rate limitations

SEMI S14-0521 (technical revision)

P02800 - SEMI P28 - Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture StdTpc-Cluster Tools This Standard does not recommendThis standard was technically approved by the global Micropatterning Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 25, 2007. It was available at www. semi. org in June 2007. Originally published in 1996. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available